Examples of Research using Infrared Heating Methods

Topic Author Equipment model used
Fundamental and applied research on SiC elements
P-110 RTA system, March 26 2003, Ohmsha
Kazuo Arai and Sadafumi Yoshida
National Institute of Advanced Industrial Science and Technology
RTA system
Ga2O3 thin films grown by heteroepitaxy using ultra-high temperature PLD system
Japan Society of Applied Physics, Spring 2001, 29a-P4-5
Hiromichi Ohta and Hideo Hosono
Transparent Electro-Active Materials Project
GVL298
SiC film deposition by TMS and hydrogen gas mixture RF plasma, Japan Society of Applied Physics, Spring 2001, 31a-P15-9 Yusuke Echigo and Hidenori Ito
Muroran Institute of Technology
GV154
Low-resistance n+ type ion injection molding for 4H-SiC created by ultra-high temperature/ultra-high-speed thermal annealing, ETL News, February 2001, Vol. 613 Kenji Fukuda and Kazuo Arai
National Institute of Advanced Industrial Science and Technology
GVL398
Control of oriented thin film by linear rapid thermal annealing, Institute of Electronics, Information and Communication Engineers Naoto Tsuchiya and Yasuhiko Nakagawa
Faculty of Engineering, University of Yamanashi
IR2000GV
Development of ultra-high vacuum reflection electron microscope (II): Infrared sample heating system, Japan Society of Applied Physics, Spring 1996, 28a-ZT-5 Takanori Akita and Ryuichi Shimizu
Osaka University
IR-1000GVH
Thermal oxidation of Si by an oxygen jet in a vacuum, Japan Society of Applied Physics, Spring 1996, 29p-N-1 Tatsuo Tsuda and Koichiro Ohtori
University of Tokyo
GVL298
Destructive thermal shock testing of plate glass using infrared radiant heating, Journal of the Ceramic Society of Japan, 103(9)960-965 (1995) Hideo Awaji, Faculty of Education, Kagoshima University
Tomoyoshi Endo, Thermo Riko
Reducing hydrogen transmission of stainless steel film by BN coating, Shinkū, No 3, 1994 Akiko Itakura
Institute for Materials Research
IR-1000GV
Optical heating in oxide atmosphere, Netsu to Tomo ni Jū Nen no Ayumi, Thermo Riko, April 1992, P-20 Takeo Hattori
Musashi Engineering University
IR-1000GV
Netsu Gijutsu Nijū Go Nen no Ayumi, April 2007 Thermo Riko

Research by the Infrared Heating Method(Paper in English)

Theme Author Model Used
In situ heat treatment of ultrathin MgO layer for giant
magnetoresistance ratio with low resistance area product in CoFeB/MgO/CoFeB magnetic tunnel junctions
Applied Physics Letters 93,192109,2008
S.Isogami, M. Takahashi
/ Tohoku University
GV198
Simultaneous scanning tunneling microscopy and stress measurements to elucidate the origins of surface forces
Review of Scientific Instruments 78,053903, 2007
Tetsuya Narushima, Niall T. Kinahan,
John J. Boland / Trinity College Dublin
GVH398
Predicting the amount of carbon in carbon nanotubes
grown by CH4 rf plasmas
Journal of Applied Physics 99,014302,2006
Y. Suda, Y. Sakai / Hokkaido University GVL298
Combined Radiation-Conduction Analysis and Experiment of Ceramic Insulation for Reentry Vehicles
Journal of Thermophysics and Heat Transfer
Vol.18,No.1,January-March 2004
National Aerospace Laboratory of Japan GV-2
Activation treatment of impurities using hybrid super RTA equipment. A. Kinoshita, J. Senzaki, M. Katou,
S. Harada,
M. Okamoto, S. Nishizawa, K. Fukuda,
F. Morikasa, T. Endou, T. Isii, T. Yashima
AIST, Thermo Riko Co.,Ltd
Nippon Thermonics Co.,Ltd
S-RTA
Pulsed Laser deposition system for producing oxide thin
films at high temperature
Review of Scientific Instruments VOL.72,No,8 Aug.2001
M. Orita, M. Ohta, H. Hiramatsu,
M. Hirano
/ Japan Science and Technology Corp.
M. Sasaki, T. Katagiri
/ Katagiri Engineering Co.,Ltd
H. Hosono / Tokyo Institute of Technology
GVL298
In situ observation of epitaxial microcrystals in thermally
grown SiO2 on Si(100)
Applied Physics Letters,Vol.74,No.18,May3,1999
N. Awaji, Y. Sugita, Y. Horii
/ Fujitsu Laboratories Co.,Ltd
I. Takahashi / Kansei Gakuin University
GV198
Periodic Changes in SiO2 / Si(111) Interface Structures
with Progress of Thermal Oxidation
Jpn.J.Appl.Phys.Vol.33(1994)pp. L675-L678
Part2,No.5A,May1,1994
K. Onishi, T. Hattori
/ Musashi Institute of Technology
GVH298
Diffusion of 57 Co in amorphous Fe-RE (RE=Dy,Tb,and
Ce) and Fe-Si-B alloys
J.Mater.Res.,Vol.8,No.9,Sep.1993,
1993 Materials Research Society
K. Yamada, Y. Iijima, K. Fukamichi
/ Tohoku University
GV198